Application scope:
Graphite, semiconductor devices, heat - resistant scouring materials.
Vacuum deposition furnace is used for the preparation of carbon carbon composite materials, deposition furnace is mainly used for graphite, semiconductor devices, heat resistant scour material surface pyrolytic carbon coating preparation.
Product Advantage
Vacuum deposition furnace is used for the preparation of carbon carbon composite materials, deposition furnace is mainly used for graphite, semiconductor devices, heat resistant scour material surface pyrolytic carbon coating preparation.
Basic parameters:
1) Design temperature: 1250℃/1650℃/1800℃/2200℃
2) Common temperature: 900~1200℃
3) Vacuum: < 50Pa
4) Pressure rise rate: empty furnace cold 6.67Pa/h(or 150Pa/24h)
5) Heating mode: graphite resistance heating or induction heating, independent temperature control, good temperature uniformity
6) Atmosphere medium: vacuum /CH4/C3H6/H2/N2/Ar
7) Gas control mode: mass flowmeter control, multi-channel gas path, uniform flow field, no dead Angle of deposition, good deposition effect;
8) Multi-stage efficient tail gas treatment system, environmentally friendly, easy to clean;
9) Furnace type: square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability;
10) Furnace body cooling mode: furnace shell water cooling, optional external circulation rapid cooling system, short cooling time, high production efficiency;
Furnace body structure:
Structure: horizontal - side discharging, vertical - upper discharging/lower discharging
Furnace locking mode: manual/automatic
Furnace shell material: inner stainless steel/full stainless steel
Thermal insulation material: carbon felt/graphite felt/carbon fiber cured felt
Heater, muffle material: graphite /CFC
Infrared instrument: single color/double color
Power supply: KGPS/IGBT(only for intermediate frequency heating)
Product Specification
|
Parameter/Model
|
GJC-0305-C
|
GJC-0505-C
|
GJC-0608-C
|
GJC-0612-C
|
GJC-0812-C
|
GJC-1120-C
|
GJC-1218-C
|
GJC-1520-C
|
|
Working Zone Dimension
φ×H（mm）
|
300×500
|
500×500
|
600×800
|
600×1200
|
800×1200
|
1100×2000
|
1200×1800
|
1500×2000
|
|
Maximum Temperature
（℃）
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
2300
|
|
Temperature uniformity（℃）
|
±5
|
±5
|
±5/±7.5
|
±7.5/±10
|
±7.5/±10
|
±10/±15
|
±10/±15
|
±15/±20
|
|
Limit Vacuum（Pa）
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
1-100
|
|
Voltage Rise
（Pa/h）
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
0.67
|
|
Heating Method
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
Resistance/induction
|
